| Author | Hazarika, Bikiron |
| Note | A thesis report submitted in partial fulfillment of the requirements for the degree of
Master of Engineering in Mechatronics, School of Engineering and Technology |
| Publisher | Asian Institute of Technology |
| Abstract | The principle of electron force microscopy is a well-known phenomenon of sensing in high
sensitive MEMS based accelerometers & AFM. We intend to extend this concept towards
development of a gyroscope, based on the fact that gyroscope sensors are accelerometers, but
with a drive mode. For the drive mode we used comb-drives and an electron-tunneling unit as
sense mode. The FEA and multi-physics analysis is being done using ANSYS and Coventorware
software and the simulation of the fabrication steps is done using Coventorware software
.The proposed process flow is also presented. |
| Year | 2011 |
| Type | Thesis |
| School | School of Engineering and Technology (SET) |
| Department | Department of Industrial Systems Engineering (DISE) |
| Academic Program/FoS | Microelectronics (ME) |
| Chairperson(s) | Afzulpurkar, Nitin V. |
| Examination Committee(s) | Chumnarn Punyasai;Bohez, Erik L.J ;Nisar, Asim ; |